Sapphire Product
 

About Sapphire

High-purity sapphire material (Sapphire; Al2O3) is a hardness materials for semiconductor, LED, IC packaging, TFT, and other high-tech industries. PROFAB Ltd. Companys KY Skill provides customers precision machining, single-grain production, and cost-effectiveness of sapphire products. We believe our Sapphire products will be the best choice to customers.

 

Characteristics of PROFAB Sapphire

  • Strong hardness, anti-scratch and anti-corrosion.
  • Through crystalline arrangement process reach to the optical-grade light-transmission requirements (including UV, visible, and infrared, etc.)
  • Excellent chemical resistance (including Halogens, HCI plasmas, Fluorine plasma NF3, CF4 ...)
  • anti-high-temperature and anti-high-pressure
  • Stable electrical insulating material of high dielectric constant
  • Customize shapes and architecture

Applications of Sapphire

  • HPD CVD
  • PECVD
  • Dry Etch
  • Wet Etch

 

Products of Sapphire

  • Plasma containment tubes
  • >330mm large components
  • Viewports
  • End effectors
  • Lift pins
  • Edge rings
  • Showerheads
  • E-chucks


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